Entire industry chain model of photoresist, full category of semiconductor photoresist

ArF PhotoresistKrF PhotoresistI-LINE PhotoresistE-beam Photoresist Encapsulation Photoresist

KrF Photoresist

Xuzhou Bokang is a Chinese supplier of photoresist from raw materials to finished products.

PHS resin system, including high activation energy positive resist, low activation energy positive resist and negative resist, has the advantages of high resolution, etching resistance and ion implantation resistance. Thin resist is characterized by high resolution, which can reach HP120nm, thick resist is characterized by high aspect ratio, AR can reach 12:1, and has entered the client verification. At present, nearly 20+ KrF products have been verified and sold in Chinese 12-inch Fab.

Exposure wavelength Product Name Technical nodes and applications Process capability CD Process capability THK Image
248nm HTKN601-0.4B Compound semiconductor (Metal lift-off, KrF negative photoresist) 0.25um 0.4-0.7um
248nm HTKN601-0.6 Compound semiconductor (Metal lift-off, KrF negative photoresist) 0.3um 0.6-1.3um
248nm HTKN602 IC Negative Resin 1um 0.8-1.4um
248nm HTK3003 CIS 0.24um 2.4~3.5um
19 Records 12
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